Influence of multiple cleaning on the detection capabilities of ISFET structures

Authors

  • Kinga Kondracka Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, ul. Koszykowa 75, 00-662 Warszawa
  • Piotr Firek Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, ul. Koszykowa 75, 00-662 Warszawa
  • Marta Grodzik Warsaw University of Life Sciences, Nowoursynowska 159, 02-776 Warsaw
  • Maciej Szmidt Warsaw University of Life Sciences, Nowoursynowska 159, 02-776 Warsaw
  • Ewa Sawosz – Chwalibóg Warsaw University of Life Sciences, Nowoursynowska 159, 02-776 Warsaw
  • Jan Szmidt Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, ul. Koszykowa 75, 00-662 Warszawa

Abstract

The method of cleaning the ISFET structures after application of a biological substance was developed. There are few references in the literature to cleaning methods of this type of structure for biological applications, but they are relatively complex and difficult to automate. We decided to use resources commonly available in technological laboratories and methods that could be relatively easily automated, which would enable the full potential of ISFET transistors to be used. During the experiments, both acetone and deionized water were tested. The cleaning method was modified and it was checked whether it is possible to use such a method on one transistor more than once and how it affects the transistor's detection capabilities. We managed to obtain an effective method of cleaning ISFETs from biological substances. This method does not allow for obtaining exactly the same state as the original state of the transistor, but it ensures its correct operation and determining the influence of the tested biological substance on the transistor based on the results.

References

REFERENCES

Poghossian A., Schöning M. J., Schroth P., Simonis A., Lüth H., "An ISFET-based penicillin sensor with high sensitivity, low detection limit and long lifetime," Sensors and Actuators B: Chemical 76, 519-526 (2001).

Abramova N., Ipatov A., Levichev S., Bratov A., "Integrated multi-sensor chip with photocured polymer membranes containing copolymerised plasticizer for direct pH, potassium, sodium and chloride ions determination in blood serum," Talanta 79, 984–989 (2009).

Fang I-Ju Trewyn, B. G., "Chapter three - Application of Mesoporous Silica Nanoparticles in Intracellular Delivery of Molecules and Proteins," Methods in Enzymology 508, 41-59 (2012).

Pfeifer L., Zabarylo U., Stankovic G., Bensmann N., Minet O., "Vitality of the MeWo melanoma cell line during intense nanosecond-pulsed NIR laser radiation," Laser Phys. Lett. 11 (2014).

Lei, K. F., "Review on impedance detection of cellular responses in micro/nano environment," Micromachines 5, 1-12 (2014).

Arafa H., Obahiagbon U., Kullman D., Domínguez F. J., Magee A., Christen J. B., "Characterization and application of a discrete quartz extended-gate ISFET for the assessment of tumor cell viability," International Conference on Electrical. In Proceedings of the Electronics and System Engineering (2014).

Shinwari M. W., Deen M. J., Landheer D., "Study of the electrolyte-insulator-semiconductor field-effect transistor (EISFET) with applications in biosensor design," Microelectronics Reliability 47(12), 2025-2057 (2007).

Susloparova A., Thang Vu X., Koppenhöfer D., Law J. K., Ingebrandt S., "Investigation of ISFET device parameters to optimize for impedimetric sensing of cellular adhesion" Phys. Status Solidi A. 211, 1395–1403 (2014).

Ṕerez J. F. V., Velasco M. M. M., Rosas M. E. M., Reyes H. L. M., "ISFET sensor characterization," Procedia Engineering 35, 270-275 (2012).

Kaisti, M., "Detection principles of biological and chemical FET sensors," Biosensors and Bioelectronics 98, 437-448 (2017).

Akbari E., Moradi R., Afroozeh A., Alizadeh A., Nilashi M., "A new approach for prediction of graphene based ISFET using regression tree and neural network," Superlattices and Microstructures 130, 241-248 (2019).

Sarkar D., Liu W., Xie X., Anselmo A. C., Mitragotri S., Banerjee K., "MoS2 Field-Effect Transistor for Next-Generation Label-Free Biosensors," ACS nano 8 (2014).

Schäfer S., Eick S., Hofmann B., Dufaux T., Stockmann R., Wrobel G., et al., "Time-dependent observation of individual cellular binding events to field-effect transistors," Biosensors and Bioelectronics 24, 1201–1208 (2009).

Firek P., Cichomski M., Waskiewicz M., Piwoński I., Kisielewska A., "ISFET structures with chemically modified membrane for bovine serum albumin detection," Circuit World 44, 45-50 (2018).

Akbari E., Nabipour N., Hadavi S. M., Nilashi M., "Analytical investigation of ion-sensitive field effect transistor based on graphene," J Mater Sci: Mater Electron. 31, 6461–6466 (2020).

Martinoia S., Rosso N., Grattarola M., Lorenzelli L., Margesin B., Zen M., "Development of ISFET array-based microsystems for bioelectrochemical measurements of cell populations," Biosensors & Bioelectronics 16, 1043–1050 (2001).

Meng L., Fan D., Huang Y., Jiang Z., Zhang C., "Comparison studies of surface cleaning methods for PAN-based carbon fibers with acetone, supercritical acetone and subcritical alkali aqueous solutions," Applied Surface Science 261, 415–421 (2012).

Downloads

Published

2024-04-19

Issue

Section

Microelectronics, nanoelectronics