Computer Controlled System for the Magnetron Sputtering Deposition of the Metallic Multilayers
Abstract
of the scientific program on the chemical reaction leading to
intermetallic compound formation. This reaction is known as self
propagation high temperature synthesis (SHS). The key problem
in this investigation is to produce the metallic multilayer system
with good repeatability of thin films thicknesses. Thin should
be thin, parallel and with low volume of intermixing region
between components. Computer control system for the pulsed
(mid frequency MF) magnetron sputtering equipment dedicated
for metallic multilayers deposition is presented in this paper. The
rotation velocity of the sample holder and the gas inlet through
membrane valves are the main parameters controlled by the
system. Parameters of the magnetron gun power supply, sample
temperature and technological gas pressure are registered. The
process cards which define all process parameters are collected
for each dedicated process type. All cards are collected in a
process cards library which permits for full automatization of
all operations. Software was written in a graphical LabVIEW
environment.
Full Text:
PDFReferences
Zeldovich Ya.B , Frank-Kamenetski D.A., (1938), The theory of thermal
propagation of flames, Zh. Fiz. Khim. 12, 100–105 (in Russian); English
translation in Collected Works of Ya.B. Zeldovich, vol. 1, Princeton,
Univ. Press, 1992
Merzhanov A.G., Dubovitzkii F.I., (1966) Modern state of thermal
explosion theory. Usp. Khim, v.35, N 4, 656-683.
Merzhanov A.G., (1969) The theory of stable homogeneous combustion
of condensed substances, Combust. and Flame, v.13, 143-156.
Mania R., Wsołek M., Koziński S., (1994), Intermetallic compound prepared
by SHS method, Materiały Konferencji Nowoczesne Technologie
w Inżynierii Powierzchni, Spała, 443-446, (in Polish).
Mania R., (1998), Manufacturing of Mo-Al. Intermetallics by SHS,
Inżynieria Materiałowa, 19, 921.
Mania R., Dąbrowski M., Godlewska E., Koziński S., Rutkowska A.,
Trybalska B., Wojciechowski K., (2003), Some application of TiAl Micropowders
Produced by Self-Propagation High-Temperature Synthesis,
Intern. Journal of SHS, 12, 159.
Mania R., Stobierski L., Godlewska E., Koziński S., Mars K., (2004),
Composite from Mo-Al. Intermetallics Compouds and Aluminium Nitride,
Journal of SHS, 13, 49.
Blobaum K.J., Van Heerden D., Gavens A.J., Weihs T.P., (2003), Al/Ni
formation reactions: characterization of the metastableAl9Ni2 phase and
analysis of its formation, Acta Materialia, 51, 3871.
Trenkle J. C., Koerner L. J., Tate M. W., Gruner S. M., Weihs T. P. and
Hufnagel T. C., (2008), Phase transformations during rapid heating of
Al/Ni multilayer foils, Appl. Physics Lett., 93, 081903.
Gavens J., Van Heerden D.,Mann A. B., Reiss M. E. and Weihsa T. P.,
(2000), Effect of intermixing on self-propagating exothermic reactionsin
Al/Ni nanolaminate foils, J. Appl. Phys., 87 1255.
Ramos A.S., Vieira M.T., Morgiel J., Grzonka J., Simöes S., Vieira
M.F., (2009), Production of intermetallic compounds from Ti/Al and
Ni/Al multilayer thin films–A comparative study, Journal of Alloys and
Compounds, 484335.
Marszałek K., Mania R., (2011), Sputtering system for thin (TiAl)N
film deposition on cemented carbide, Elektronika, R. 52, nr 8, 70-72.
(in Polish)
Marszałek K., Sobków Z. , Cioruń J., (2009), LabVIEW controller for
sputtering process, Elektronika, R. 50 nr 1, 102–104, (in Polish).
Marszałek K., Sobków Z., Pisarkiewicz T., (2009), LCD displays test
system working in LabVIEW envionment , Elektronika, vol. 50, nr 9,
–86. (in Polish)
Standard IEEE 802.15.4–2006, IEEE Computer Society, (2006),
http://standards.ieee.org/getieee802/download/802.15.4-2006.pdf
IEEE 802.15.4 Standard, Retrieved 2012-10-18, (2012),
http://www.ieee802.org/15/pub/TG4.html
ZigBee Standard Specification–ZigBee Alliance, (2012),
http://www.zigbee.org/Specifications/ZigBee/download.aspx
Stępień J., Marszałek K., (2008), Wireless data networks for sensor,
Elektronika, 49, 6, 275–278, (in Polish).
Faludi R., Building Wireless Sensor Networks, O’Reilly, (2010).
Eady F., (2007), Hands-On ZigBee: Implementing 802.15.4 with Microcontrollers,
ZigBee Aliance.
Xiang L., (2013), Design of household control system based on ZigBee,
GSM and TCP/IP protocol, Control and Automation (ICCA), 1372–
Gomez C., Paradells J., (2010), Wireless home automation networks:
A survey of architectures and technologies, Communications Magazine
IEEE, 48, 92–101.
Stępień J., Kołodziej J., Ostrowski J., Golański R., (2012), Simple intelligent
building system with ZigBee communication units, Elektronika,
R. 53 nr 9, 157–162, (in Polish).
Przepiórkowski J., Silniki elektryczne w praktyce elektronika, Legionowo,
BTC, (2012).
Crnosija P., Kuzmanovic B., Ajdukovic S., (2000), Microcomputer
implementation of optimal algorithms for closed-loop control of hybrid
stepper motor drives, Industrial Electronics, IEEE Transactions, 4, 6,
–1325.
Gong S., Heb., (2009), LabVIEW-base automatic rising and falling speed
control of stepper motor, Electrical Machines and Systems ICEMS, 1–4.
Benhua Z., Chenghua L., Shiming S., Gan Lu, (2011), Design on a
unipolar and unidirectional stepper motor circuit, Proc. of the Int. Conf.
on Electronic and Mechanical Engineering and Information Technology,
, 1795–1797.
Refbacks
- There are currently no refbacks.
International Journal of Electronics and Telecommunications
is a periodical of Electronics and Telecommunications Committee
of Polish Academy of Sciences
eISSN: 2300-1933