Influence of multiple cleaning on the detection capabilities of ISFET structures
Abstract
The method of cleaning the ISFET structures after application of a biological substance was developed. There are few references in the literature to cleaning methods of this type of structure for biological applications, but they are relatively complex and difficult to automate. We decided to use resources commonly available in technological laboratories and methods that could be relatively easily automated, which would enable the full potential of ISFET transistors to be used. During the experiments, both acetone and deionized water were tested. The cleaning method was modified and it was checked whether it is possible to use such a method on one transistor more than once and how it affects the transistor's detection capabilities. We managed to obtain an effective method of cleaning ISFETs from biological substances. This method does not allow for obtaining exactly the same state as the original state of the transistor, but it ensures its correct operation and determining the influence of the tested biological substance on the transistor based on the results.References
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